| アブストラクト: |
X-ray refractive optical lens systems have been successfully elaborated,
designed, fabricated at the Institute for Microstructure Technology at
the Forschungszentrum Karlsruhe (Germany) using LIGA technology in
recent years. The lenses are structured in a SU-8 polymer. The
capability of the LIGA technique to create an arbitrary profile of the
focusing microstructures allow the fabrication of lenses with different
curvature radius of parabolic geometry, minimized absorption and a large
depth of focus. Also a set of planar lens systems on one substrate can
be realized with 17 lenses providing identical focal distances for
different X-ray energies from 2 to over 100 keV. Nickel lenses
fabricated by electroforming using polymer templates can be applied for
energies larger than 80 keV. The parabolic crossed lenses are used for
2D nano focusing of monochromatic beams. The quasi-parabolic crossed
lenses with a submicron focus and a focus depth of the centimetre range
can be used as an achromatic system. Mosaic truncated parabolic lenses
with a focusing aperture up to 1 mm are made to increase the X-ray
intensity in the focused spot. |
